Microstructured vertical-cavity surface-emitting laser with large scanning range for LiDAR

Microstructured lasers play a crucial role in LiDAR applications; however, the turning angle of current edge-emitting structures is constrained to less than 90 degrees due to inherent limitations. In contrast, microstructured vertical-cavity surface-emitting lasers (MSVCSELs) offer a simpler manufacturing process and a wider turning angle, rendering them more promising. This study presents the successful demonstration of an MSVCSEL based on the 940 nm III-V system. Utilizing a microstructure period of 5 μm, the MSVCSEL achieves a deflection angle of ±50°. Furthermore, an experimental investigation was conducted into the impact of oxidation effects on the high aluminum layer concerning the far-field intensity distribution of the MSVCSEL, offering strong support for the subsequent MSVCSEL design.