Towards Additive Manufacturing of Broadband Metamaterial Matching Layers using Two-Photon Polymerization Lithography
Enhancing the bandwidth (BW) of ultrasonic transducers is essential for improving medical imaging and sensing. Gradient metamaterial matching layers (MMLs) offer superior performance compared to conventional quarter-wavelength matching layers (CMLs) but are difficult to fabricate. This work demonstrates the use of Two-Photon Polymerization Lithography (TPP), an additive manufacturing technique with micron-scale resolution, to produce cone-shaped microstructures from acoustic hard (IP-Q/IP-S) materials that are filled with soft (PDMS) materials. These structures create a gradient in acoustic impedance. Fabrication was performed on glass substrates and piezocomposites, and acoustic performance was evaluated in water. Results show the TPP-fabricated MML on a glass substrate achieves a 67 % higher BW than with no ML and comparable to a CML, while also transmitting higher sound pressure. A MML transducer was fabricated with a 136 % relative BW. This proves the feasibility of TPP-fabricated MMLs and their potential for advancing ultrasonic transducer technology.
Authors
- Henning Heuer
- Richard Nauber (ORCID: https://orcid.org/0000-0002-3295-0727)
- Robert Kirchner (ORCID: https://orcid.org/0000-0003-0033-2905)
- Tönnis Trittler (ORCID: https://orcid.org/0000-0001-5921-9478)
- Moritz Herzog (ORCID: https://orcid.org/0000-0002-0676-6926)
- Severin Schweiger (ORCID: https://orcid.org/0000-0002-3278-1011)
- Julian Kober (ORCID: https://orcid.org/0009-0004-0685-2463)
- Sören Köble (ORCID: https://orcid.org/0000-0002-4379-6956)
- Paul-Henry Koop
- Susan Walter (ORCID: https://orcid.org/0000-0003-1911-2582)
Institutions
- Vodafone (Germany) (DE)
- Fresenius (Germany) (DE)
- Fraunhofer Institute for Photonic Microsystems (DE)
- Fraunhofer Institute for Ceramic Technologies and Systems (DE)
- Technische Universität Dresden (DE)
Publication Details
- Published
- 2025-09-15
- DOI
- https://doi.org/10.1109/ius62464.2025.11201249
- Primary Topic
- Nanofabrication and Lithography Techniques
- Type
- article
- Field-Weighted Citation Impact
- 0.00