High bandwidth LiNbO <sub>3</sub> BAW filters with (W/SiO <sub>2</sub> ) Bragg mirror
In this work, LiNbO<inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">3</inf> solidly mounted bulk acoustic wave filters with patterned (W/SiO<inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</inf>) Bragg mirrors and exploiting longitudinal waves have been designed and fabricated to target the n77 (3.3 – 4.2 GHz) and n79 (4.4 – 5.0 GHz) frequency bands. Simple ladder structures based on 3 and 5 resonators have been implemented for a first technological assessment. The filters exhibit 3-dB bandwidths of 960 and 700 MHz, respectively, and minimum insertion loss close to 1 dB. Although out-of-band rejections need to be optimized, these results constitute a first proof of concept towards the integration of LiNbO<inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">3</inf> solidly-mounted resonators for high fractional bandwidth filters.
Authors
- R. Hida (ORCID: https://orcid.org/0000-0002-9417-4508)
- L. Andreutti
- G. Lima
- Elisa Soulat
- JORGE RECARTE HENRIQUEZ GUERRERO
- E. Jouin
- Jennifer Guillaume
- Marie Bousquet (ORCID: https://orcid.org/0000-0002-2963-8011)
- Grégory Enyedi
- Julien Delprato
- P. Perreau
- Alain Campo
- A. Lefèvre
- Jean-Marie Quemper
- G. Castellan
- Alexandre Reinhardt (ORCID: https://orcid.org/0000-0002-0547-311X)
- D. Zuanon
- C. Le Bohec
Institutions
- Commissariat à l'Énergie Atomique et aux Énergies Alternatives (FR)
- CEA Grenoble (FR)
- Laboratoire d'Électronique des Technologies de l'Information (FR)
- Université Grenoble Alpes (FR)
Publication Details
- Published
- 2025-09-15
- DOI
- https://doi.org/10.1109/ius62464.2025.11201621
- Primary Topic
- Acoustic Wave Resonator Technologies
- Type
- article
- Field-Weighted Citation Impact
- 0.00