Boost the Acoustic Wave Resonator to Handle ultra-High Power Density Beyond 10 W/mm ²

This work reports a significant enhancement in the power handling capacity of interdigital transducer (IDT)-based acoustic wave resonators. We develop a novel layered acoustic wave (LAW) architecture that strategically reshapes the mechanical and thermal boundary conditions on the basis of conventional surface acoustic wave (SAW) designs. This approach effectively suppresses acoustomigration and improves heat dissipation. To quantify the improvement, we presented a detailed power distribution analysis to analyze failure mechanisms at the single resonator level. Guided by this analysis method, we designed and performed comprehensive power handling tests, which confirm a substantial increase in power capacity for the proposed LAW architecture. Our findings underscore the high potential of boundary conditions optimization for enabling acoustic wave devices in next-generation high-power RF applications.