Angular emission evolution of the ZrO/W(100) Schottky emitter

An investigation of the uniformity and evolution of the angular emission distribution of the ZrO/W(100) Schottky emitter operated at an angular intensity of 1.0 mA/sr is studied. Emitters of 0.49, 0.90, 0.96, and 1.73 μm apex radius r are studied, and generally for larger radius, the emission distribution is wider and more uniform. Off-axis optical properties are computed in cases where the data were available. However, for a 1.73 μm radius emitter, collapsing net planes (ring collapse) is significant. Uniformity control by temperature for 0.49 and 0.96 μm radii emitter is shown. Over one year, the uniformity for 0.90 μm radius emitter falls, however, the shape change from “stage 1” to “stage 2” does not significantly affect the emission’s uniformity.

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Publication Details

Journal
Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena
Published
2025-10-20
DOI
https://doi.org/10.1116/6.0004792
Primary Topic
Semiconductor materials and devices
Type
article
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article

Angular emission evolution of the ZrO/W(100) Schottky emitter

Alan Bahm, G. A. Schwind, Yunyun Chen, Jessica R. Panther
Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena
Semiconductor materials and devices
article

Angular emission evolution of the ZrO/W(100) Schottky emitter

Alan Bahm, G. A. Schwind, Yunyun Chen, Jessica R. Panther
article en

Abstract

An investigation of the uniformity and evolution of the angular emission distribution of the ZrO/W(100) Schottky emitter operated at an angular intensity of 1.0 mA/sr is studied. Emitters of 0.49, 0.90, 0.96, and 1.73 μm apex radius r are studied, and generally for larger radius, the emission distribution is wider and more uniform. Off-axis optical properties are computed in cases where the data were available. However, for a 1.73 μm radius emitter, collapsing net planes (ring collapse) is significant. Uniformity control by temperature for 0.49 and 0.96 μm radii emitter is shown. Over one year, the uniformity for 0.90 μm radius emitter falls, however, the shape change from “stage 1” to “stage 2” does not significantly affect the emission’s uniformity.

Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and PhenomenaVol. 43(6)
Thermo Fisher Scientific (United States) (US)
Openalex Percentile: Top 70%
Semiconductor materials and devices
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Angular emission evolution of the ZrO/W(100) Schottky emitter — Alan Bahm, G. A. Schwind, et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena (2025) | TGRS Research Map | TGRS