Recent Advancements and Emerging Applications in Atomic Layer Deposition (ALD) on High-Porosity Materials
Authors
- Mikhaël Bechelany (ORCID: https://orcid.org/0000-0002-2913-2846)
Institutions
- Institut Européen des Membranes (FR)
Publication Details
- Journal
- SPIRE - Sciences Po Institutional REpository
- Published
- 2024-10-06
- Primary Topic
- Semiconductor materials and devices
- Type
- article
- Field-Weighted Citation Impact
- 0.00