Density and fractality of collision cascades in α-Ga2O3

Control over radiation defect generation is essential while applying ion-beam technology to materials. In this work, we study disorder formation in rhombohedral polymorph of gallium oxide (α-Ga2O3) as a function of the bombarding ion mass. As such, we discriminate the impact of the collision cascades density, specifically its impact on the surface amorphization rates in α-Ga2O3. Importantly, along with collecting experimental data, we calculated collision cascades parameters using different algorithms based on the binary collision approximation predicting disorder accumulation trends observed in the experiments. Furthermore, we showed that collision cascades in α-Ga2O3 can be modeled within a fractal geometry framework, correlating fractal dimension with the collision cascade density. These results enhance the understanding of radiation defects in Ga2O3 polymorphs, applicable in the development of the ion beam technology in these interesting materials.