Parameter optimization of corrugated diaphragm based on thermal-fluid-solid field coupling

The indicators of pressure sensors are determined by corrugated diaphragm directly on physical level. For the purpose of improving the performance and accuracy of pressure sensors, it is significant to design corrugated diaphragm with optimal performance. A thermal-fluid-solid coupling mechanical model is established in this paper for the analysis and calculation of corrugated diaphragm based on the finite element method, which is proposed from the level of sensor core system for the first time in the field. The correctness and rationality of this model have been verified by the experiment. Subsequently, with regarding axial stiffness of the corrugated diaphragm as optimization objective, three representative influencing factors, which consist of temperature change, volume of silicone oil and wave height of corrugated diaphragm, were analyzed and optimized based on the multi-field coupling model, and function relationship between stiffness of the corrugated diaphragm and these three parameters was obtained respectively. The performance of the corrugated diaphragm is optimized comprehensively by the results of the research in this paper, thereby improving the performance of pressure sensors and providing method reference and theoretical basis for optimization of other parameters of the sensor core.