High-speed infrared spectroscopic polarization measurement method using a mid-IR monolithic polarizing interferometric module

This paper describes a high-speed infrared spectroscopic polarization measurement method combining a mid-IR monolithic polarizing interferometric module with an FT-IR spectrometer. The proposed mid-IR polarization measurement system features no rotating components in polarization modulation, enabling us to extract spectroscopic ellipsometric parameters with a measurement speed of a few seconds in the mid-IR range. The proposed system can provide a much faster mid-IR range polarization measurement capability than currently available commercial IR spectroscopic ellipsometer systems. In this study, detailed theoretical background and experiments are conducted to demonstrate the feasibility and performance of the proposed method.