Sensor Fabrication Assisted by Initiated Chemical Vapor Deposition

Sensors are indispensable in modern society, and their performance depends critically on the sensitive layer. Initiated chemical vapor deposition (iCVD) is a superior technique for fabricating these layers, enabling solvent-free, low-temperature deposition of uniform polymer films onto a wide range of substrates, including flexible and structured surfaces, without compromising their integrity. iCVD-engineered sensitive layers have demonstrated substantial improvements in sensor sensitivity, selectivity, and stability across diverse applications. This viewpoint provides a comprehensive overview of recent advancements in iCVD-assisted sensor fabrication for various applications, including humidity, gas, pH, glucose, fluorescence, and force sensing. By allowing precise control over material properties and interfacial design, iCVD emerges as a versatile and scalable technique for next-generation sensing systems in the environmental monitoring, healthcare, and industrial processes.