Deep-learning-driven automation of inner and outer object segmentation in SEM/TEM imaging for semiconductor metrology

Authors

Isaac Wilfried Sanou (ORCID: https://orcid.org/0000-0003-0821-4823)
Ali Hallal (ORCID: https://orcid.org/0000-0002-2284-9027)
Vincent Barra (ORCID: https://orcid.org/0000-0002-8975-222X)
Julien Baderot (ORCID: https://orcid.org/0009-0001-3842-9852)
J. Foucher
Léo Mazauric

Institutions

Centre National de la Recherche Scientifique (FR)
Université Clermont Auvergne (FR)
Laboratoire d'Informatique, de Modélisation et d'Optimisation des Systèmes (FR)

Publication Details

Journal: Journal of Micro/Nanopatterning Materials and Metrology
Published: 2025-10-09
DOI: https://doi.org/10.1117/1.jmm.24.4.041406
Primary Topic: Electron and X-Ray Spectroscopy Techniques
Type: article
Field-Weighted Citation Impact: 0.00

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article

Deep-learning-driven automation of inner and outer object segmentation in SEM/TEM imaging for semiconductor metrology

Isaac Wilfried Sanou, Ali Hallal, Vincent Barra, Julien Baderot et al.

Oct 9, 2025

Journal of Micro/Nanopatterning Materials and Metrology

Electron and X-Ray Spectroscopy Techniques

article

Deep-learning-driven automation of inner and outer object segmentation in SEM/TEM imaging for semiconductor metrology

Isaac Wilfried Sanou, Ali Hallal, Vincent Barra, Julien Baderot, J. Foucher, Léo Mazauric

October 9, 2025article en

Abstract

No abstract available for this paper.

Journal of Micro/Nanopatterning Materials and MetrologyVol. 24(04)

Centre National de la Recherche Scientifique (FR), Université Clermont Auvergne (FR), Laboratoire d'Informatique, de Modélisation et d'Optimisation des Systèmes (FR)

Openalex Percentile: Top 73%

Electron and X-Ray Spectroscopy Techniques

DOI Source OpenAlex

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