Polygon-based unified Fourier-modal approach for diffractive-optics simulations
In this article, we derive a theoretical formalism that unifies the rigorous coupled wave analysis and the dynamical diffraction theory. Based on this formalism, we design a computational approach for the diffraction calculation for the nanoscale lamellar gratings with an arbitrary line profile shape. In this approach, the gratings line profile is approximated as a polygon. This proves to be convenient since such an approach does not rely on the geometry model of the grating. We test the proposed approach against other computational theories and a synchrotron scattering experiment.
Authors
- K. V. Nikolaev (ORCID: https://orcid.org/0000-0002-4752-9599)
- S. N. Yakunin (ORCID: https://orcid.org/0000-0001-6689-878X)
- Philipp Hönicke (ORCID: https://orcid.org/0000-0002-0712-903X)
- M.A. Botchev (ORCID: https://orcid.org/0000-0001-5901-7120)
- Analía Fernández Herrero (ORCID: https://orcid.org/0000-0003-4804-5999)
- Victor Soltwisch (ORCID: https://orcid.org/0000-0001-8469-8589)
- Frank Scholze (ORCID: https://orcid.org/0000-0001-8414-2169)
Institutions
- Physikalisch-Technische Bundesanstalt (DE)
- Moscow Institute of Physics and Technology (RU)
- Kurchatov Institute (RU)
- Keldysh Institute of Applied Mathematics (RU)
Publication Details
- Journal
- Physical review. A/Physical review, A
- Published
- 2025-10-09
- DOI
- https://doi.org/10.1103/n2qj-l886
- Primary Topic
- Optical Coatings and Gratings
- Type
- article
- Field-Weighted Citation Impact
- 0.00