Measurement of Lateral Resolution in Confocal Raman Spectroscopy Using Indium Arsenide Nanowires
ABSTRACT Lateral resolution is a key figure of merit for spectroscopy across all applications. Confocal Raman spectroscopy is able to provide chemical and structural information with submicrometre resolution, resulting in widespread use across multiple disciplines of science and technology. However, the lack of agreed‐upon measurement standards and appropriate reference samples has hindered uptake. Here, we report the development and demonstration of a reference sample based on indium arsenide (InAs) semiconducting nanowires for measuring the lateral resolution of confocal Raman spectroscopy with a pathway for traceability to the International System of Units (SI). An interlaboratory comparison involving 15 participants from 11 countries has been conducted to rigorously test and demonstrate the suitability of the sample and the method. The study identified required revisions to the measurement protocol to improve the consistency of data analysis and that the long‐term operational stability of the reference sample requires further improvement. Based on a revised data analysis protocol, the method delivered consistent results at the 95% confidence level for eight of the nine participants who returned full datasets. Outcomes from this study have contributed to the publication of a new international standard (ISO 23124:2024).
Authors
- A. Zahab (ORCID: https://orcid.org/0000-0002-4281-7647)
- Marc Chaigneau
- Tehseen Adel (ORCID: https://orcid.org/0000-0001-9869-0123)
- Hugo Kerdoncuff (ORCID: https://orcid.org/0000-0003-2893-5927)
- Shinsuke Kashiwagi
- Li‐Lin Tay (ORCID: https://orcid.org/0000-0003-3408-3636)
- Keith R. Paton (ORCID: https://orcid.org/0000-0003-0300-8676)
- Jeongyong Kim
- Nobuyasu Itoh (ORCID: https://orcid.org/0000-0003-0163-4454)
- Elif Özçeri (ORCID: https://orcid.org/0000-0001-6116-076X)
- Thomas Dieing
- Erlon H. Martins Ferreira (ORCID: https://orcid.org/0000-0002-0943-6148)
- Lingling Ren
- Maxim Shkunov (ORCID: https://orcid.org/0000-0003-2338-373X)
- O. Lancry (ORCID: https://orcid.org/0000-0002-8497-2274)
- Gemma Rius (ORCID: https://orcid.org/0000-0003-0552-1043)
- Sebastian Wood (ORCID: https://orcid.org/0000-0002-8574-0475)
- Andrea Richter
- Alessio Sacco
- Tomas Peach (ORCID: https://orcid.org/0000-0001-5239-0133)
- David Steinmetz
- A. Tempez (ORCID: https://orcid.org/0000-0002-4399-0003)
- Angela R. Hight Walker (ORCID: https://orcid.org/0000-0003-1385-0672)
- Fernando A. Castro (ORCID: https://orcid.org/0000-0002-2409-8300)
- Paul Finnie (ORCID: https://orcid.org/0000-0003-1598-2230)
- Matthieu Paillet (ORCID: https://orcid.org/0000-0001-7038-9101)
- Ruth Rawcliffe
- HyukSang Kwon (ORCID: https://orcid.org/0000-0002-9964-832X)
- Yaxuan Yao
- Andrea Mario Rossi
Institutions
- Centre National de la Recherche Scientifique (FR)
- National Physical Laboratory (GB)
- Horiba (Japan) (JP)
- Bruker (United States) (US)
- Korea Research Institute of Standards and Science (KR)
- University of Surrey (GB)
- Instituto Nacional de Metrologia, Qualidade e Tecnologia (BR)
- Horiba (France) (FR)
- Physical Measurement Laboratory (US)
- Compound Semiconductor Centre (United Kingdom) (GB)
- Oxford Instruments (Germany) (DE)
- Laboratoire Charles Coulomb (FR)
- Istituto Nazionale di Ricerca Metrologica (IT)
- Material Measurement Laboratory (US)
- NKT Holding (Denmark) (DK)
- National Research Council Canada (CA)
- Institut de Microelectrònica de Barcelona (ES)
- National Institute of Metrology (CN)
- National Institute of Advanced Industrial Science and Technology (JP)
- Sungkyunkwan University (KR)
Publication Details
- Journal
- Journal of Raman Spectroscopy
- Published
- 2025-10-08
- DOI
- https://doi.org/10.1002/jrs.70054
- Primary Topic
- Spectroscopy Techniques in Biomedical and Chemical Research
- Type
- article
- Field-Weighted Citation Impact
- 0.00
Funders
- National Institute of Standards and Technology