Measuring Chemical Shifts with Energy-Dispersive X-Ray Spectroscopy
Electron microscopy uses energy-dispersive x-ray spectroscopy (EDS) and electron energy loss spectroscopy (EELS) for elemental analysis. EDS and EELS energy resolutions are commonly between 30 and 100 eV or 0.01 and 1 eV, respectively. Large solid angle EDS detector technology has increased collection efficiency to enable precision spectroscopy via averaging of 0.02-0.1 eV. This improved precision gives access to chemical shifts; examples are shown in compounds of Al, Ti, and W. EDS can now detect chemical information in a complementary parameter space (accelerating voltage, thickness, atomic number) to that covered by EELS.
Authors
- Brian Zutter (ORCID: https://orcid.org/0000-0002-3604-5791)
- Yueyun Chen (ORCID: https://orcid.org/0009-0008-4325-068X)
- Rebekah Jin (ORCID: https://orcid.org/0000-0002-5425-5741)
- B. C. Regan (ORCID: https://orcid.org/0000-0003-3923-2688)
- Matthew Mecklenburg (ORCID: https://orcid.org/0000-0003-0581-4153)
- Jared J. Lodico (ORCID: https://orcid.org/0009-0009-0316-7467)
- Tristan O’Neill (ORCID: https://orcid.org/0000-0001-9745-9480)
- Yarin Heffes
Institutions
- California NanoSystems Institute (US)
- University of California, Los Angeles (US)
- University of California System (US)
Publication Details
- Journal
- Physical Review Letters
- Published
- 2025-10-08
- DOI
- https://doi.org/10.1103/t1rs-7kr2
- Primary Topic
- X-ray Spectroscopy and Fluorescence Analysis
- Type
- article
- Field-Weighted Citation Impact
- 0.00