Aberration-corrected beam scanning system based on cascaded metalens arrays [Invited]

Metasurface-based beam steering devices offer a promising route toward high-speed scanning by enabling seamless integration with micro-electro-mechanical systems (MEMS). In this work, we propose a beam scanning system based on a cascaded metalens array. By employing a quadratic phase profile and the ray-tracing method, we optimize the phase distribution of the cascaded sub-lenses, achieving aberration-corrected beam steering. To validate the proposed design, we fabricate all-silicon geometric-phase metasurface samples and demonstrate a minimalist beam scanning system capable of achieving a scanning range of 20° × 20° and a scanning frequency up to 700 Hz. The demonstrated near-diffraction-limited beam control and fabrication-friendly design offer a new pathway toward the practical deployment of metasurface-based beam steering devices.