Research on Error Suppression Method of Multi-joint Collaborative Control in Wafer Grasping

Coordination instability in multi-joint robotic manipulators during wafer handling often leads to posture deviations, thereby compromising precision. This paper proposes an Adaptive Gain-Integrated PID Control with Dynamic Compensation (AG-PID-DC) to address this issue. Based on the dynamic model of a 7-degree-of-freedom (7-DOF) robot, the method enhances conventional independent joint PD control by introducing a global dynamic coupling compensation strategy that suppresses inter-joint dynamic interference. To further improve control performance, adaptive gain tuning, an anti-windup integral mechanism, and a feedforward compensation module are incorporated. Simulation experiments conducted on the Franka Emika robotic arm demonstrate that the proposed controller significantly reduces both average and maximum joint errors, while effectively mitigating inter-joint error propagation. These results verify the method’s effectiveness for high-precision wafer handling and highlight its potential to support automated operations in semiconductor manufacturing.