Kilowatt-Level EUV Regenerative Amplifier Free-Electron Laser Enabled by Transverse Gradient Undulator in a Storage Ring

High-average-power extreme ultraviolet (EUV) sources are essential for large-scale nanoscale chip manufacturing, yet commercially available laser-produced plasma sources face challenges in scaling to the kilowatt level. We propose a novel scheme that combines the high repetition rate of a diffraction-limited storage ring with a regenerative amplifier free-electron laser (RAFEL) employing a transverse gradient undulator (TGU). By introducing dispersion in the storage ring, electrons of different energies are directed into corresponding magnetic field strengths of the TGU, thereby satisfying the resonance condition under a large energy spread and increasing the FEL gain. Simulations show that at equilibrium, the average EUV power exceeds 1 kW, with an output pulse energy reaching ∼2.86 μJ, while the energy spread stabilizes at ∼0.45%. These results demonstrate the feasibility of ring-based RAFEL with TGU as a promising route toward kilowatt-level EUV sources.

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Publication Details

Journal
Photonics
Published
2025-10-02
DOI
https://doi.org/10.3390/photonics12100983
Primary Topic
Advanced X-ray Imaging Techniques
Type
article
Field-Weighted Citation Impact
0.00

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article

Kilowatt-Level EUV Regenerative Amplifier Free-Electron Laser Enabled by Transverse Gradient Undulator in a Storage Ring

Nanshun Huang, Tao Liu, C F He, Haixiao Deng et al.
Photonics
Advanced X-ray Imaging Techniques
article

Kilowatt-Level EUV Regenerative Amplifier Free-Electron Laser Enabled by Transverse Gradient Undulator in a Storage Ring

Nanshun Huang, Tao Liu, C F He, Haixiao Deng, Changliang Li, Bo Liu
article en

Abstract

High-average-power extreme ultraviolet (EUV) sources are essential for large-scale nanoscale chip manufacturing, yet commercially available laser-produced plasma sources face challenges in scaling to the kilowatt level. We propose a novel scheme that combines the high repetition rate of a diffraction-limited storage ring with a regenerative amplifier free-electron laser (RAFEL) employing a transverse gradient undulator (TGU). By introducing dispersion in the storage ring, electrons of different energies are directed into corresponding magnetic field strengths of the TGU, thereby satisfying the resonance condition under a large energy spread and increasing the FEL gain. Simulations show that at equilibrium, the average EUV power exceeds 1 kW, with an output pulse energy reaching ∼2.86 μJ, while the energy spread stabilizes at ∼0.45%. These results demonstrate the feasibility of ring-based RAFEL with TGU as a promising route toward kilowatt-level EUV sources.

PhotonicsVol. 12(10)
Chinese Academy of Sciences (CN), Shanghai Advanced Research Institute (CN), Shanghai Institute of Applied Physics (CN), University of Chinese Academy of Sciences (CN)
National Natural Science Foundation of China, Chinese Academy of Sciences, Chinese Academy of Sciences, Shanghai Branch, National Key Research and Development Program of China
Openalex Percentile: Top 63%
Advanced X-ray Imaging Techniques
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Kilowatt-Level EUV Regenerative Amplifier Free-Electron Laser Enabled by Transverse Gradient Undulator in a Storage Ring — Nanshun Huang, Tao Liu, et al. · Photonics (2025) | TGRS Research Map | TGRS