Electric-discharge xenon chloride laser with a modular excitation system

The work is devoted to the study of the characteristics of an electric-discharge excimer laser on xenon chloride, with a modular implementation of the excitation system. Attention is paid to the development and optimization of the laser design, providing an output radiation energy of up to 1.8 J per pulse. The discharge excitation system consisted of six modules synchronously operating on a common load. The synchronicity of the modules was no worse than 5 ns. The results of an experimental study of the energy and time characteristics of laser radiation depending on the composition and pressure of the working mixture, charging voltage, and parameters of the discharge excitation circuit are presented. It is shown that the optimal working medium is HC1:Xe:Ne - 1:17:2000 at a total pressure of 4 atmospheres. The duration of the generation pulse was 60-150 ns depending on the parameters of the excitation system modules.