Injection of atmospheric pressure glow discharge plasma in an argon flow into a forevacuum pressure region

The results of the study of optical radiation of a plasma jet generated due to injection of atmospheric pressure glow discharge plasma with a working gas flow into a region of reduced pressure of 0.5 – 133 Pa (≈ 3∙10-3 – 1 Torr) are presented. To generate plasma under such conditions, a two-electrode discharge system was used based on a glow discharge at atmospheric pressure in an argon flow, where the anode was a diaphragm with an opening with a diameter of 200-300 µm. In this way, a pressure difference was ensured between the discharge system of the plasma generator and the vacuum chamber into which the plasma jet was injected. It is shown that in the specified pressure range the excitation temperature of electrons is about 0.6 eV (≈ 6900 K). The prospects for using such a plasma generator as an effective addition to existing systems using powerful microwave and terahertz radiation for plasma generation are considered.