Tutorial lecture : The chemistry of cryogenic etching

Authors

Rémi Dussart (ORCID: https://orcid.org/0000-0003-2001-5034)
Loı̈c Becerra (ORCID: https://orcid.org/0009-0008-7738-2197)
Philippe Lefaucheux (ORCID: https://orcid.org/0000-0001-7889-8891)
Thomas Tillocher (ORCID: https://orcid.org/0000-0002-9160-5595)

Institutions

Groupe de Recherches sur l'Energétique des Milieux Ionisés (FR)

Publication Details

Journal: SPIRE - Sciences Po Institutional REpository
Published: 2025-06-15
Primary Topic: Spacecraft and Cryogenic Technologies
Type: article
Field-Weighted Citation Impact: 0.00

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article

Tutorial lecture : The chemistry of cryogenic etching

Rémi Dussart, Loı̈c Becerra, Philippe Lefaucheux, Thomas Tillocher

Jun 15, 2025

SPIRE - Sciences Po Institutional REpository

Spacecraft and Cryogenic Technologies

article

Tutorial lecture : The chemistry of cryogenic etching

Rémi Dussart, Loı̈c Becerra, Philippe Lefaucheux, Thomas Tillocher

June 15, 2025article en

Abstract

No abstract available for this paper.

SPIRE - Sciences Po Institutional REpository

Groupe de Recherches sur l'Energétique des Milieux Ionisés (FR)

Openalex Percentile: Top 65%

Spacecraft and Cryogenic Technologies

Open Access PDF OpenAlex

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Tutorial lecture : The chemistry of cryogenic etching — Rémi Dussart, Loı̈c Becerra, et al. · SPIRE - Sciences Po Institutional REpository (2025) | TGRS Research Map | TGRS