Feasibility Study of Frequency-Based Intraocular Pressure Sensing Using Microfabricated Cantilevers

Glaucoma is among the leading causes of blindness worldwide, requiring more sensitive and effective methods for early diagnosis and monitoring. However, current intraocular pressure (IOP) measurement techniques are limited to in-clinic diagnostics and do not provide continuous analysis. The present study proposes and assesses a microfabricated microcantilever device with a piezoelectric material deposited on its surface, with the objective of analyzing its sensitivity within a typical IOP range between 12 and 32 mmHg. The methodology encompassed numerical simulations based on multiphysics modeling using COMSOL Multiphysics software, complemented by a simplified equivalent electrical model to thoroughly investigate the dynamic and electrical behavior of the microcantilever. The results indicated that, despite the relatively low sensitivity achieved within the investigated range, the research provided a deeper insight into the fundamental operational mechanisms of the proposed structure. Furthermore, the study highlighted the limitations of the equivalent electrical model, leading to promising future alternatives for the design and refinement of the microfabricated IOP sensors.