SELF-ASSEMBLY OF 3D MESOSTRUCTURES USING LOCAL ION-PLASMA TREATMENT
The technology of self-assembly of three-dimensional cubic mesostructures is presented, based on ion-plasma action on certain local areas of flat blanks formed from Cr and Cr/SiO films. The driving force of self-assembly is the stress gradient arising in chromium during ion bombardment in the plasma of Ar RF induction discharge. Folding of the blank into a three-dimensional structure occurs when the elements of the blank are suspended as a result of etching of the underlying silicon.
Authors
- А. Н. Бабушкин (ORCID: https://orcid.org/0000-0001-9487-2800)
Publication Details
- Journal
- Микроэлектроника / Russian Microelectronics
- Published
- 2025-01-01
- DOI
- https://doi.org/10.7868/s3034548025030081
- Primary Topic
- Modular Robots and Swarm Intelligence
- Type
- article
- Field-Weighted Citation Impact
- 0.00