Impact of Post-Deposition Heat Treatment on the Microstructure and Mechanical Properties of Boron Nitride Thin Films Prepared by Radio Frequency Magnetron Sputtering

The effects of post-deposition heat treatment on the microstructure and mechanical properties of boron nitride thin films deposited on 316L stainless steel substrates via radio frequency magnetron sputteringwere investigated . Thermal annealing procedures applied to BN coatings at 850°C within a nitrogen environment for 1.5 hours to study how heat treatment alters coating structural and functional behaviour. A systematic examination was performed to evaluate how heat treatments affected both microstructural transformations and phase compositions as well as mechanical properties. Hot treatment enhanced mechanical film properties by raising hardness values from the original 5.35 GPa in as-deposited films to 11.4 GPa alongside a clear linear thermal connection. The research shows that correct post-deposition heat treatment strengthens BN thin film structures and mechanical characteristics thus making them suitable for industrial-level applications.