Monomeric Sr Complexes Combined with Tetradentate Enaminolate Ligands for Containing Sr Thin-Film Deposition

New strontium complexes, Sr(ONO1)<sub>2</sub> (strontium-1-(bis(2-methoxyethyl)amino)-3,3-dimethylbut-1-en-2-olate) (<b>1</b>), Sr(ONO2)<sub>2</sub> (strontium-1-(bis(2-ethoxyethyl)amino)-3,3-dimethylbut-1-en-2-olate) (<b>2</b>), and Sr(ONO3)<sub>2</sub> (strontium-2-(bis(2-methoxyethyl)amino)-1-(dimethylamino)ethen-1-olate) (<b>3</b>), were successfully synthesized and characterized using tetradentate ligands. The molecular structures of <b>1-3</b> were elucidated by nuclear magnetic resonance (NMR) spectroscopy, thermogravimetric analysis (TGA), elemental analysis (EA), and single-crystal X-ray crystallography (XRC). All three complexes exhibited mononuclear structures, featuring nearly identical bicapped trigonal prismatic geometries. TGA revealed that <b>1</b>, <b>2</b>, and <b>3</b> retained residues of approximately 9.9, 11.9, and 34.5% at 450 °C, respectively. Notably, <b>1</b> showed volatility at 70 °C under 0.75 Torr and exhibited a vapor pressure of 0.1 Torr at 150 °C. The enthalpy of evaporation (Δ<i>H</i><sub>vap</sub>) for <b>1</b> was calculated to be 50.3 kJ/mol. Among the synthesized complexes, <b>1</b> demonstrated the highest thermal stability and is considered a promising precursor for atomic layer deposition (ALD) of strontium-containing oxide thin films.

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Journal
Inorganic Chemistry
Published
2025-09-26
DOI
https://doi.org/10.1021/acs.inorgchem.5c02456
Primary Topic
Semiconductor materials and devices
Type
article
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article

Monomeric Sr Complexes Combined with Tetradentate Enaminolate Ligands for Containing Sr Thin-Film Deposition

Seung Uk Son, Sunyoung Shin, Sangmi Gu, Ji Yeon Ryu et al.
Inorganic Chemistry
Semiconductor materials and devices
article

Monomeric Sr Complexes Combined with Tetradentate Enaminolate Ligands for Containing Sr Thin-Film Deposition

Seung Uk Son, Sunyoung Shin, Sangmi Gu, Ji Yeon Ryu, Bo Keun Park, Taek‐Mo Chung, Yongmin Go
article en

Abstract

New strontium complexes, Sr(ONO1)<sub>2</sub> (strontium-1-(bis(2-methoxyethyl)amino)-3,3-dimethylbut-1-en-2-olate) (<b>1</b>), Sr(ONO2)<sub>2</sub> (strontium-1-(bis(2-ethoxyethyl)amino)-3,3-dimethylbut-1-en-2-olate) (<b>2</b>), and Sr(ONO3)<sub>2</sub> (strontium-2-(bis(2-methoxyethyl)amino)-1-(dimethylamino)ethen-1-olate) (<b>3</b>), were successfully synthesized and characterized using tetradentate ligands. The molecular structures of <b>1-3</b> were elucidated by nuclear magnetic resonance (NMR) spectroscopy, thermogravimetric analysis (TGA), elemental analysis (EA), and single-crystal X-ray crystallography (XRC). All three complexes exhibited mononuclear structures, featuring nearly identical bicapped trigonal prismatic geometries. TGA revealed that <b>1</b>, <b>2</b>, and <b>3</b> retained residues of approximately 9.9, 11.9, and 34.5% at 450 °C, respectively. Notably, <b>1</b> showed volatility at 70 °C under 0.75 Torr and exhibited a vapor pressure of 0.1 Torr at 150 °C. The enthalpy of evaporation (Δ<i>H</i><sub>vap</sub>) for <b>1</b> was calculated to be 50.3 kJ/mol. Among the synthesized complexes, <b>1</b> demonstrated the highest thermal stability and is considered a promising precursor for atomic layer deposition (ALD) of strontium-containing oxide thin films.

Inorganic ChemistryVol. 64(40)
University of Science and Technology (YE), Materials Research Center (IN), Korea Research Institute of Chemical Technology (KR), Sungkyunkwan University (KR), Korea University of Science and Technology (KR)
Openalex Percentile: Top 74%
Semiconductor materials and devices
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Monomeric Sr Complexes Combined with Tetradentate Enaminolate Ligands for Containing Sr Thin-Film Deposition — Seung Uk Son, Sunyoung Shin, et al. · Inorganic Chemistry (2025) | TGRS Research Map | TGRS