Monomeric Sr Complexes Combined with Tetradentate Enaminolate Ligands for Containing Sr Thin-Film Deposition
New strontium complexes, Sr(ONO1)<sub>2</sub> (strontium-1-(bis(2-methoxyethyl)amino)-3,3-dimethylbut-1-en-2-olate) (<b>1</b>), Sr(ONO2)<sub>2</sub> (strontium-1-(bis(2-ethoxyethyl)amino)-3,3-dimethylbut-1-en-2-olate) (<b>2</b>), and Sr(ONO3)<sub>2</sub> (strontium-2-(bis(2-methoxyethyl)amino)-1-(dimethylamino)ethen-1-olate) (<b>3</b>), were successfully synthesized and characterized using tetradentate ligands. The molecular structures of <b>1-3</b> were elucidated by nuclear magnetic resonance (NMR) spectroscopy, thermogravimetric analysis (TGA), elemental analysis (EA), and single-crystal X-ray crystallography (XRC). All three complexes exhibited mononuclear structures, featuring nearly identical bicapped trigonal prismatic geometries. TGA revealed that <b>1</b>, <b>2</b>, and <b>3</b> retained residues of approximately 9.9, 11.9, and 34.5% at 450 °C, respectively. Notably, <b>1</b> showed volatility at 70 °C under 0.75 Torr and exhibited a vapor pressure of 0.1 Torr at 150 °C. The enthalpy of evaporation (Δ<i>H</i><sub>vap</sub>) for <b>1</b> was calculated to be 50.3 kJ/mol. Among the synthesized complexes, <b>1</b> demonstrated the highest thermal stability and is considered a promising precursor for atomic layer deposition (ALD) of strontium-containing oxide thin films.
Authors
- Seung Uk Son (ORCID: https://orcid.org/0000-0002-4779-9302)
- Sunyoung Shin (ORCID: https://orcid.org/0009-0004-2935-7414)
- Sangmi Gu
- Ji Yeon Ryu (ORCID: https://orcid.org/0000-0001-6321-5576)
- Bo Keun Park (ORCID: https://orcid.org/0000-0002-4066-0500)
- Taek‐Mo Chung (ORCID: https://orcid.org/0000-0002-5169-2671)
- Yongmin Go
Institutions
- University of Science and Technology (YE)
- Materials Research Center (IN)
- Korea Research Institute of Chemical Technology (KR)
- Sungkyunkwan University (KR)
- Korea University of Science and Technology (KR)
Publication Details
- Journal
- Inorganic Chemistry
- Published
- 2025-09-26
- DOI
- https://doi.org/10.1021/acs.inorgchem.5c02456
- Primary Topic
- Semiconductor materials and devices
- Type
- article
- Field-Weighted Citation Impact
- 0.00