Thermoelectric performance of bulklike MoS2 thin films: Fabrication, characterization, and Seebeck coefficient analysis

Molybdenum disulfide (MoS2) is of particular interest for thermoelectric devices due to its inherently low lattice thermal conductivity, tunable electronic properties, and ability to sustain a high Seebeck coefficient. This study investigates the thermoelectric potential of bulklike MoS2 thin films with a thickness of ∼7 nm, fabricated via the sulfurization of MoO3. The thickness was confirmed through atomic force microscopy and Raman spectroscopy, with a wavenumber shift (Δω) of 25.1 cm−1, consistent with bulklike MoS2 characteristics. Meanwhile, the Raman mapping results reveal that the MoS2 thin film exhibits flat morphology and uniform thickness, ensuring the accuracy and reliability of the Seebeck coefficient measurements. The Seebeck coefficient of MoS2 was measured as 643 μV/K and analyzed using the 2ω method. The results demonstrate the reliability of the data and highlight the potential of MoS2 thin films for efficient thermoelectric energy conversion. This work underscores the viability of bulklike 2D materials in developing next-generation energy-efficient devices.

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Publication Details

Journal
Journal of Vacuum Science & Technology A Vacuum Surfaces and Films
Published
2025-09-24
DOI
https://doi.org/10.1116/6.0004696
Primary Topic
Advanced Thermoelectric Materials and Devices
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article
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article

Thermoelectric performance of bulklike MoS2 thin films: Fabrication, characterization, and Seebeck coefficient analysis

Chin‐Hsiang Cheng, Sean Wu, Yee‐Shin Chang, Tsung‐Shine Ko et al.
Journal of Vacuum Science & Technology A Vacuum Surfaces and Films
Advanced Thermoelectric Materials and Devices
article

Thermoelectric performance of bulklike MoS2 thin films: Fabrication, characterization, and Seebeck coefficient analysis

Chin‐Hsiang Cheng, Sean Wu, Yee‐Shin Chang, Tsung‐Shine Ko, Yifan Chen, Po-Chen Kuo, S. C. Lo
article en

Abstract

Molybdenum disulfide (MoS2) is of particular interest for thermoelectric devices due to its inherently low lattice thermal conductivity, tunable electronic properties, and ability to sustain a high Seebeck coefficient. This study investigates the thermoelectric potential of bulklike MoS2 thin films with a thickness of ∼7 nm, fabricated via the sulfurization of MoO3. The thickness was confirmed through atomic force microscopy and Raman spectroscopy, with a wavenumber shift (Δω) of 25.1 cm−1, consistent with bulklike MoS2 characteristics. Meanwhile, the Raman mapping results reveal that the MoS2 thin film exhibits flat morphology and uniform thickness, ensuring the accuracy and reliability of the Seebeck coefficient measurements. The Seebeck coefficient of MoS2 was measured as 643 μV/K and analyzed using the 2ω method. The results demonstrate the reliability of the data and highlight the potential of MoS2 thin films for efficient thermoelectric energy conversion. This work underscores the viability of bulklike 2D materials in developing next-generation energy-efficient devices.

Journal of Vacuum Science & Technology A Vacuum Surfaces and FilmsVol. 43(6)
National Formosa University (TW), Lunghwa University of Science and Technology (TW), National Changhua University of Education (TW), National Cheng Kung University (TW)
Openalex Percentile: Top 80%
Advanced Thermoelectric Materials and Devices
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Thermoelectric performance of bulklike MoS2 thin films: Fabrication, characterization, and Seebeck coefficient analysis — Chin‐Hsiang Cheng, Sean Wu, et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films (2025) | TGRS Research Map | TGRS