High-saturation-current waveguide-coupled Ge-on-Si photodetector fabricated by a standard foundry process for RF applications

We demonstrate novel high-saturation-current waveguide-coupled vertical Ge-on-Si photodetectors, achieving a saturation current of 21.4 mA, a dark current of 30.1 nA at -3 V, and a 3 dB bandwidth of 15.2 GHz at -3 V.

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Publication Details

Published
2025-01-01
DOI
https://doi.org/10.1364/cleo_si.2025.ss181_3
Primary Topic
Photonic and Optical Devices
Type
article
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article

High-saturation-current waveguide-coupled Ge-on-Si photodetector fabricated by a standard foundry process for RF applications

Makoto Okano, Mitsuru Takenaka, Rui Tang, Kasidit Toprasertpong et al.
Photonic and Optical Devices
article

High-saturation-current waveguide-coupled Ge-on-Si photodetector fabricated by a standard foundry process for RF applications

Makoto Okano, Mitsuru Takenaka, Rui Tang, Kasidit Toprasertpong, Shinichi Takagi, Chao Zhang
article en

Abstract

We demonstrate novel high-saturation-current waveguide-coupled vertical Ge-on-Si photodetectors, achieving a saturation current of 21.4 mA, a dark current of 30.1 nA at -3 V, and a 3 dB bandwidth of 15.2 GHz at -3 V.

Tokyo University of Information Sciences (JP), National Institute of Advanced Industrial Science and Technology (JP), The University of Tokyo (JP)
Openalex Percentile: Top 74%
Photonic and Optical Devices
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