Piezo-Optomechanically Tunable Alumina Resonators at Ultraviolet Wavelengths in a CMOS-Fabricated Architecture
We present tunable photonic resonators using piezo-strained alumina-based waveguides fabricated in a 200 mm volume-CMOS foundry. At 320 nm, we demonstrate linewidths of 2.5 GHz (propagation loss of 1.4 dB/cm) and tuning rates of ∼ 120 MHz/V.
Authors
- Andrew Leenheer (ORCID: https://orcid.org/0000-0003-4735-292X)
- Zachary A. Castillo
- Yuan‐Yu Jau (ORCID: https://orcid.org/0000-0001-7949-7563)
- Bethany Little (ORCID: https://orcid.org/0000-0003-3289-2798)
- Matt Eichenfield (ORCID: https://orcid.org/0000-0003-0863-7877)
- Roman Shugayev (ORCID: https://orcid.org/0000-0002-1187-6089)
Institutions
- University of Arizona (US)
- University of New Mexico (US)
- Sandia National Laboratories (US)
Publication Details
- Published
- 2025-01-01
- DOI
- https://doi.org/10.1364/cleo_si.2025.ss189_1
- Primary Topic
- Mechanical and Optical Resonators
- Type
- article
- Field-Weighted Citation Impact
- 0.00