Precision Thermal Sensing With Chip-Scale Optomechanical Transducers Compatible With CMOS Technology
We demonstrate a design for a CMOS compatible high frequency optomechanical transducer with a strong response to temperature. This devices exhibits a temperature coefficient of frequency of 0.48%/K.
Authors
- Alexis Samoylov
- Talha Yerebakan
- Chee Wei Wong (ORCID: https://orcid.org/0000-0001-7652-7720)
- Jaime Gonzalo Flor Flores (ORCID: https://orcid.org/0000-0002-6089-6086)
Institutions
- University of California, Los Angeles (US)
Publication Details
- Published
- 2025-01-01
- DOI
- https://doi.org/10.1364/cleo_si.2025.ss190_3
- Primary Topic
- Mechanical and Optical Resonators
- Type
- article
- Field-Weighted Citation Impact
- 0.00