Thermoelastic Acoustic Emitter in Silicon Nitride Platform for Optomechanics Applications
Thermoelastic surface acoustic wave (SAW) is demonstrated on a thin film silicon nitride platform with metal grating acoustic emitter. A SAW frequency of 0.749 GHz is applied for both phase modulation and intermodal scattering.
Authors
- Ahmet Tarık Işık
- Akshay Keloth (ORCID: https://orcid.org/0009-0003-6933-2994)
- David Marpaung (ORCID: https://orcid.org/0000-0002-5434-7195)
- Petrus J.M. van der Slot (ORCID: https://orcid.org/0000-0001-7473-1752)
- Zheng Zheng (ORCID: https://orcid.org/0000-0001-7661-6846)
Institutions
- University of Twente (NL)
Publication Details
- Published
- 2025-01-01
- DOI
- https://doi.org/10.1364/cleo_si.2025.ss190_2
- Primary Topic
- Mechanical and Optical Resonators
- Type
- article
- Field-Weighted Citation Impact
- 0.00