Phase Error Analysis and Adaptive Compensation for MEMS Quad-Mass Gyroscopes

To solve the problem of phase error in MEMS quad mass gyroscope measurement and control circuit, which leads to orthogonal coupling error in angular velocity output, this paper establishes a phase error model and proposes a circuit phase error identification and compensation method. Firstly, the main sources of phase error and its influence on the working mode of the gyroscope are analyzed, then a golden section method is proposed based on finding the minimum driving voltage. This method identifies and compensates for phase error through continuous iteration of the compensation interval. Experiments show that using this method, the zero-bias instability of the MEMS gyroscope is reduced from 4.266°/h to 0.662°/h, and the angle random walk is reduced from 0.637°/√h to 0.162°/√h, achieving an improvement in the zero-bias performance of the gyroscope.