A step and repeat and roll-to-plate nanoimprint process for the fabrication of nanostructured substrates

Nanoimprint Lithography (NIL), in particular UV-based NIL, is a micro- and nanoreplication technology, which offers very high resolution and high process flexibility. [1]-[3] Applications range from optics to life sciences. We are using step-and-repeat nanoimprinting followed by a roll-to-plate nanoimprinting process to fabricate structures which can e.g. be used for biomolecular sensing.