Amorphous silicon carbide for microstructured optics

Amorphous silicon carbide offers unique properties for the optimization of microstructured optical elements. We present a study on the technological processing, the resulting material properties as well as potential applications.

Authors

Stefan Sinzinger (ORCID: https://orcid.org/0000-0001-8031-4787)
Julian Wüster (ORCID: https://orcid.org/0000-0002-9925-7097)
Patrick Feßer
Thomas Handte

Institutions

Technische Universität Ilmenau (DE)

Publication Details

Journal: EPJ Web of Conferences
Published: 2025-01-01
DOI: https://doi.org/10.1051/epjconf/202533508002
Primary Topic: Thin-Film Transistor Technologies
Type: article
Field-Weighted Citation Impact: 0.00

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article

Amorphous silicon carbide for microstructured optics

Stefan Sinzinger, Julian Wüster, Patrick Feßer, Thomas Handte

Jan 1, 2025

EPJ Web of Conferences

Thin-Film Transistor Technologies

article

Amorphous silicon carbide for microstructured optics

Stefan Sinzinger, Julian Wüster, Patrick Feßer, Thomas Handte

January 1, 2025article en

Abstract

EPJ Web of ConferencesVol. 335

Technische Universität Ilmenau (DE)

Openalex Percentile: Top 75%

Thin-Film Transistor Technologies

DOI Open Access PDF OpenAlex

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Amorphous silicon carbide for microstructured optics — Stefan Sinzinger, Julian Wüster, et al. · EPJ Web of Conferences (2025) | TGRS Research Map | TGRS