Depuis quand existe le terme grec διαφωτισμός ?

The neologism διαφωτισμός seems to appear in Greek in the second half of the nineteenth century as an adaptation of the terms Aufklärung, Enlightenment and Illuminismo. However, the Greek term is found as early as the twelfth century in the writings of Eustathius of Thessalonica. His unpublished text was first published in an 1832 edition.