Inverse Design of Diffractive Metasurfaces Using Diffusion Models

Metasurfaces are ultrathin optical elements composed of engineered subwavelength structures that enable precise control of light. Their inverse design─determining a geometry that yields a desired optical response─is challenging due to the complex, nonlinear relationship between structure and optical properties. This often requires expert tuning, is prone to local minima, and involves significant computational overhead. In this work, we address these challenges by integrating the generative capabilities of diffusion models into computational design workflows. Using an RCWA simulator, we generate training data consisting of metasurface geometries and their corresponding far-field scattering patterns. We then train a conditional diffusion model to predict meta-atom geometry and height from a target spatial power distribution at a specified wavelength, sampled from a continuous supported band. Once trained, the model can generate metasurfaces with low error, either directly using RCWA-guided posterior sampling or by serving as an initializer for traditional optimization methods. We demonstrate our approach on the design of a spatially uniform intensity splitter and a polarization beam splitter, both produced with low error in under 30 min. To support further research in data-driven metasurface design, we publicly release our code and data sets.