Measurement capability of particle size analysis with glancing light

The glancing light method, combined with modern image analysis, enables rapid quantitative determination of surface contamination. This non-destructive approach measures particle concentration, size distribution, and some qualitative features. The system's usability is expanded through sampling materials like strips or pads, addressing issues with direct measurement. Key challenges include establishing reliable procedures to run the measurement system analysis, focusing on validation and verification. Settings are based on three pillars: establishing a computable sensitivity threshold, achieving high sensitivity for smallest particle detection, and maintaining size determination accuracy. Measurement accuracy is evaluated using reference particles and compared with other systems. Calibration ensures method qualification, with on-site validation necessary for specific applications. The method follows Gage R&R guidelines for repeatability, reproducibility, and linearity, making it suitable for manufacturing processes where in-line measurement is impractical.