Quantum Metrology of Fluxonium Superconducting Qubits for Scalable Quantum Information Processing

Fluxonium superconducting qubits have been fabricated on sapphire substrates using an e-beam lithography-based Dolan Bridge technique. To enhance process control and improve yield, the quantum circuit fabrication is monitored through a non-destructive, in-line X-ray metrology method.

Authors

Chia‐Hung Chen (ORCID: https://orcid.org/0000-0001-5097-3968)
Haw-Tyng Huang (ORCID: https://orcid.org/0000-0002-9953-1623)
Yen‐Hsiang Lin (ORCID: https://orcid.org/0000-0003-2940-428X)
Wei‐Chen Lin (ORCID: https://orcid.org/0000-0002-8142-538X)
Yi-Shu Lu
M.-W. Ho

Publication Details

Published: 2025-01-01
DOI: https://doi.org/10.1364/cleo_at.2025.jps200_85
Primary Topic: Quantum Computing Algorithms and Architecture
Type: article
Field-Weighted Citation Impact: 0.00

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article

Quantum Metrology of Fluxonium Superconducting Qubits for Scalable Quantum Information Processing

Chia‐Hung Chen, Haw-Tyng Huang, Yen‐Hsiang Lin, Wei‐Chen Lin et al.

Jan 1, 2025

Quantum Computing Algorithms and Architecture

article

Quantum Metrology of Fluxonium Superconducting Qubits for Scalable Quantum Information Processing

Chia‐Hung Chen, Haw-Tyng Huang, Yen‐Hsiang Lin, Wei‐Chen Lin, Yi-Shu Lu, M.-W. Ho

January 1, 2025article en

Abstract

Fluxonium superconducting qubits have been fabricated on sapphire substrates using an e-beam lithography-based Dolan Bridge technique. To enhance process control and improve yield, the quantum circuit fabrication is monitored through a non-destructive, in-line X-ray metrology method.

Openalex Percentile: Top 87%

Quantum Computing Algorithms and Architecture

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Quantum Metrology of Fluxonium Superconducting Qubits for Scalable Quantum Information Processing — Chia‐Hung Chen, Haw-Tyng Huang, et al. · (2025) | TGRS Research Map | TGRS