A High-Resolution and High-Bandwidth Nano-Optomechanical Accelerometer with Ultra-low Bias Instability

We demonstrate a bulk-micromachined accelerometer with 100 kHz bandwidth featuring an intrinsically differential Mach-Zehnder strain-sensing interferometer. The differential, broadband readout provides reduced susceptibility to temperature, package stress, and laser frequency fluctuations resulting in a bias instability of 7.2 µg at 343.7 seconds.

Authors

Allison Rubenok
Matt Eichenfield (ORCID: https://orcid.org/0000-0003-0863-7877)
Michael E. Miller (ORCID: https://orcid.org/0000-0001-6306-3437)
Daniel Dominguez (ORCID: https://orcid.org/0000-0001-5151-8131)
Chang Ge (ORCID: https://orcid.org/0009-0001-6832-9051)

Publication Details

Published: 2025-01-01
DOI: https://doi.org/10.1364/cleo_at.2025.aa112_3
Primary Topic: Mechanical and Optical Resonators
Type: article
Field-Weighted Citation Impact: 0.00

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article

A High-Resolution and High-Bandwidth Nano-Optomechanical Accelerometer with Ultra-low Bias Instability

Allison Rubenok, Matt Eichenfield, Michael E. Miller, Daniel Dominguez et al.

Jan 1, 2025

Mechanical and Optical Resonators

article

A High-Resolution and High-Bandwidth Nano-Optomechanical Accelerometer with Ultra-low Bias Instability

Allison Rubenok, Matt Eichenfield, Michael E. Miller, Daniel Dominguez, Chang Ge

January 1, 2025article en

Abstract

We demonstrate a bulk-micromachined accelerometer with 100 kHz bandwidth featuring an intrinsically differential Mach-Zehnder strain-sensing interferometer. The differential, broadband readout provides reduced susceptibility to temperature, package stress, and laser frequency fluctuations resulting in a bias instability of 7.2 µg at 343.7 seconds.

Openalex Percentile: Top 80%

Mechanical and Optical Resonators

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A High-Resolution and High-Bandwidth Nano-Optomechanical Accelerometer with Ultra-low Bias Instability — Allison Rubenok, Matt Eichenfield, et al. · (2025) | TGRS Research Map | TGRS