Selective Patterning of Electrical Interconnects on Transparent Materials by Ultrafast Laser-induced Chemical Vapor Deposition

We patterned conductive interconnects on transparent substrates and tubes using ultrashort laser pulses, enabling tunable sheet resistance for applications in semiconductors, sensors, biotechnology, and microfluidics.

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Publication Details

Published
2025-01-01
DOI
https://doi.org/10.1364/cleo_at.2025.aa100_3
Primary Topic
Semiconductor materials and devices
Type
article
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article

Selective Patterning of Electrical Interconnects on Transparent Materials by Ultrafast Laser-induced Chemical Vapor Deposition

Young‐Geun Lee, Junseok Heo, Seunghwoi Han, Young‐Jin Kim et al.
Semiconductor materials and devices
article

Selective Patterning of Electrical Interconnects on Transparent Materials by Ultrafast Laser-induced Chemical Vapor Deposition

Young‐Geun Lee, Junseok Heo, Seunghwoi Han, Young‐Jin Kim, Nagarajan Chinnapaiyan, Chanwoong Wi
article en

Abstract

We patterned conductive interconnects on transparent substrates and tubes using ultrashort laser pulses, enabling tunable sheet resistance for applications in semiconductors, sensors, biotechnology, and microfluidics.

Openalex Percentile: Top 75%
Semiconductor materials and devices
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Selective Patterning of Electrical Interconnects on Transparent Materials by Ultrafast Laser-induced Chemical Vapor Deposition — Young‐Geun Lee, Junseok Heo, et al. · (2025) | TGRS Research Map | TGRS