Selective Patterning of Electrical Interconnects on Transparent Materials by Ultrafast Laser-induced Chemical Vapor Deposition
We patterned conductive interconnects on transparent substrates and tubes using ultrashort laser pulses, enabling tunable sheet resistance for applications in semiconductors, sensors, biotechnology, and microfluidics.
Authors
- Young‐Geun Lee (ORCID: https://orcid.org/0000-0002-4229-5084)
- Junseok Heo (ORCID: https://orcid.org/0000-0002-8125-6141)
- Seunghwoi Han (ORCID: https://orcid.org/0000-0002-1374-2148)
- Young‐Jin Kim (ORCID: https://orcid.org/0000-0002-7213-5348)
- Nagarajan Chinnapaiyan
- Chanwoong Wi
Publication Details
- Published
- 2025-01-01
- DOI
- https://doi.org/10.1364/cleo_at.2025.aa100_3
- Primary Topic
- Semiconductor materials and devices
- Type
- article
- Field-Weighted Citation Impact
- 0.00