Single-shot spectroscopic ellipsometry using a metasurface array

We demonstrated a compact metasurface array-based spectroscopic ellipsometry system that allows single-shot spectropolarimetric detection and accurate determination of thin film properties without any mechanical movement.

Authors

Yuanmu Yang (ORCID: https://orcid.org/0000-0002-5264-0822)
Xinyuan Xue
Shun Wen

Publication Details

Published: 2025-01-01
DOI: https://doi.org/10.1364/cleo_at.2025.aa112_4
Primary Topic: Photonic and Optical Devices
Type: article
Field-Weighted Citation Impact: 0.00

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article

Single-shot spectroscopic ellipsometry using a metasurface array

Yuanmu Yang, Xinyuan Xue, Shun Wen

Jan 1, 2025

Photonic and Optical Devices

article

Single-shot spectroscopic ellipsometry using a metasurface array

Yuanmu Yang, Xinyuan Xue, Shun Wen

January 1, 2025article en

Abstract

Openalex Percentile: Top 75%

Photonic and Optical Devices

DOI Source OpenAlex

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Single-shot spectroscopic ellipsometry using a metasurface array — Yuanmu Yang, Xinyuan Xue, et al. · (2025) | TGRS Research Map | TGRS