Fused-Silica Dual-Shell Resonators with Photonic Integrated Readout
We propose and demonstrate photonic integrated readout of vibrational modes of fused-silica dual-shell resonators designed for MEMS gyroscopes. We detect vibrational mode frequencies near 25.8KHz and measure nano-displacements with < 5% error, matching conventional tabletop measurements.
Authors
- Ozdal Boyraz (ORCID: https://orcid.org/0000-0002-4005-1107)
- Ceren Babayiğit (ORCID: https://orcid.org/0000-0002-0062-6033)
- Andrei M. Shkel (ORCID: https://orcid.org/0000-0001-5517-7709)
- Austin R. Parrish (ORCID: https://orcid.org/0000-0003-3313-4016)
- Md Shafiqul Islam (ORCID: https://orcid.org/0000-0002-2415-1810)
- Ozan Berk Boyraz
- Lois Meira
Publication Details
- Published
- 2025-01-01
- DOI
- https://doi.org/10.1364/cleo_at.2025.jps100_85
- Primary Topic
- Photonic and Optical Devices
- Type
- article
- Field-Weighted Citation Impact
- 0.00