Integrated TiO2 photonics on glass substrates
We demonstrate integrated TiO 2 photonics by E-gun evaporation. With a superior roughness of 0.69 nm of the deposited TiO 2 film, waveguide resonators with high quality (Q > 6×10 4 ) can be realized on the glass substrate.
Authors
- Chien-Cheng Kuo (ORCID: https://orcid.org/0000-0003-0860-4549)
- Pei-Hsun Wang (ORCID: https://orcid.org/0000-0003-4940-7306)
- Po‐Kai Hsu (ORCID: https://orcid.org/0000-0001-7265-7077)
- Mingjun Chi (ORCID: https://orcid.org/0000-0001-5367-7072)
- Ziwei Wang (ORCID: https://orcid.org/0000-0003-1324-2298)
Publication Details
- Published
- 2025-01-01
- DOI
- https://doi.org/10.1364/cleo_at.2025.aa127_6
- Primary Topic
- Photonic and Optical Devices
- Type
- article
- Field-Weighted Citation Impact
- 0.00