Coplanar Waveguide (CPW) Integrated Sub-THz (94 GHz) Modulator Based on Pulsed Laser Deposited Germanium Selenide (GeSe)

In this study, we present a Sub-THz (94 GHz) modulator based on pulse laser-deposited germanium selenide (GeSe) integrated with a coplanar waveguide (CPW). The modulator achieves a notable modulation depth of 18% under a low-power laser (660 nm) with a power density of 4.41 mW/mm 2 . This device architecture holds promise for enabling the next generation of on-chip THz modulator at THz frequencies.