High-Q Lithium Niobate Microrings Enabled by a Hybrid Dry Etching and Wet Polishing Technique

We introduce a CMOS-compatible hybrid method combining dry etching and wet polishing, achieving ultra-low-loss lithium niobate waveguides (0.28 dB/cm) and high-Q microrings (Q = 1.4×10⁶), enabling scalable integration of lithium niobate photonic networks.

Authors

Zefeng Xu
Evgeny Zamburg (ORCID: https://orcid.org/0000-0002-4672-2813)
Jin Feng Leong (ORCID: https://orcid.org/0000-0002-1939-8632)
Jie Yang (ORCID: https://orcid.org/0000-0002-1472-198X)
Changfeng Zeng
Aaron Voon-Yew Thean

Publication Details

Published: 2025-01-01
DOI: https://doi.org/10.1364/cleo_at.2025.jps200_46
Primary Topic: Photonic and Optical Devices
Type: article
Field-Weighted Citation Impact: 0.00

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article

High-Q Lithium Niobate Microrings Enabled by a Hybrid Dry Etching and Wet Polishing Technique

Zefeng Xu, Evgeny Zamburg, Jin Feng Leong, Jie Yang et al.

Jan 1, 2025

Photonic and Optical Devices

article

High-Q Lithium Niobate Microrings Enabled by a Hybrid Dry Etching and Wet Polishing Technique

Zefeng Xu, Evgeny Zamburg, Jin Feng Leong, Jie Yang, Changfeng Zeng, Aaron Voon-Yew Thean

January 1, 2025article en

Abstract

Openalex Percentile: Top 75%

Photonic and Optical Devices

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High-Q Lithium Niobate Microrings Enabled by a Hybrid Dry Etching and Wet Polishing Technique — Zefeng Xu, Evgeny Zamburg, et al. · (2025) | TGRS Research Map | TGRS