Ultra-fast high-power Ge PIN photodetectors with record-high bandwidth responsivity product of 130 GHz·A/W in 300-mm monolithic CMOS silicon photonics foundry
We demonstrate mass-manufacturable, ultra-fast, high-power Ge-PIN-PDs in a 300-mm CMOS silicon photonics foundry, achieving >135GHz bandwidth, 0.96A/W responsivity, -36dB ORL, and high-quality 120Gb/s NRZ and 240Gb/s PAM4 eyes at 1mA photocurrent without TIA.
Authors
- Karel Soukup (ORCID: https://orcid.org/0000-0001-8563-0340)
- Andrea Paganini
- F. Beaudoin (ORCID: https://orcid.org/0000-0002-2453-052X)
- Brian Popielarski
- Zahidur Chowdhury (ORCID: https://orcid.org/0000-0002-5966-7593)
- Ken Giewont (ORCID: https://orcid.org/0000-0002-3408-2898)
- Bob Mulfinger
- Rick Carter
- Sujith Chandran (ORCID: https://orcid.org/0000-0002-6240-8859)
- Yusheng Bian (ORCID: https://orcid.org/0000-0003-1163-5231)
- Abdelsalam Aboketaf (ORCID: https://orcid.org/0000-0001-5953-6158)
- Asif Chowdhury (ORCID: https://orcid.org/0000-0002-9980-9517)
- Takako Hirokawa (ORCID: https://orcid.org/0000-0002-1452-082X)
- Francis O. Afzal (ORCID: https://orcid.org/0000-0002-5578-0265)
- Qidi Liu (ORCID: https://orcid.org/0000-0002-6797-4163)
- Teodor K. Stanev
- James Garofolo (ORCID: https://orcid.org/0000-0003-0397-2211)
- Kevin Dezfulian
- F.H. Baumann (ORCID: https://orcid.org/0000-0002-8061-7646)
- Arunima Dasgupta
- Kate McLean
- Hanyi Ding (ORCID: https://orcid.org/0000-0002-0307-9119)
- J. Holt (ORCID: https://orcid.org/0000-0002-4685-2810)
- Ryan Sporer
- Massimo Sorbara
- Won Suk Lee (ORCID: https://orcid.org/0000-0002-9420-4789)
- Mrunal Shah (ORCID: https://orcid.org/0009-0004-3741-9531)
- Michelle Zhang (ORCID: https://orcid.org/0000-0002-7345-6688)
- Aslı Şahin
- Arman Najafi
- Vikas Gupta
- Helen Wong
- Crystal Hedges
- Ming Gong (ORCID: https://orcid.org/0009-0000-3789-0607)
- Ted Letavic
- Scott D Benjamin
- Ben Cadieux
Publication Details
- Published
- 2025-01-01
- DOI
- https://doi.org/10.1364/cleo_at.2025.pd104_7
- Citations
- 1
- Primary Topic
- Photonic and Optical Devices
- Type
- article
- Field-Weighted Citation Impact
- 0.73