AMR Sensor With Substrate-Integrated PowderMEMS Permanent Magnets for In-Plane Biasing
Authors
- Johannes Paul (ORCID: https://orcid.org/0000-0003-0051-7715)
- Björn Gojdka (ORCID: https://orcid.org/0000-0001-9097-2329)
- Mani Teja Bodduluri (ORCID: https://orcid.org/0000-0001-5844-5641)
- Florian Ziegler (ORCID: https://orcid.org/0000-0003-4041-2758)
- Claudia Glenske
- Pascal Hille
- Thomas Lisec (ORCID: https://orcid.org/0000-0003-1266-494X)
- Lucas Becker (ORCID: https://orcid.org/0000-0003-1509-3476)
- Niels Clausen
Institutions
- Fraunhofer Institute for Silicon Technology (DE)