Progress of AlGaN-based 230nm-band far-UVC LEDs and its applications

Far-UVC light with a wavelength of 230 nm or less are harmless to human body and have a strong inactivating effect for virus. We demonstrated 228-236 nm AlGaN-based far-UVC LEDs for the purpose of virus inactivation in the human working space. We achieved the external quantum efficiency (EQE) of more than 1.5 % by introducing polarization induced p-type AlGaN layer for a 230 nm-band LED. We fabricated 230nm LED module by integrating several tens of LED tips and a parabolic mirror on the copper mount and obtained over 200 mW power under pulse operation.