Trans-timescale imaging of deep-UV femtosecond laser ablation of dielectrics with time-resolved digital holographic microscopy

We present trans-timescale imaging of femtosecond DUV laser ablation of a glass substrate, driven by linear absorption, using time-resolved digital holographic microscopy spanning from sub-picoseconds to milliseconds. This method integrates two probe branches within a pump-probe digital holographic imaging system: a femtosecond probe pulse for capturing dynamics from sub-picoseconds to nanoseconds and a nanosecond pulse for nanosecond-to-millisecond observations. To enable high-precision complex-field imaging, we developed a stable common-path interferometer, achieving milli-radian-level phase precision. Using this system, we investigated the surface processing dynamics of a BK7 glass substrate, which has an absorption edge around 300 nm, induced by a 257-nm femtosecond pump pulse. Our measurements revealed dynamic variations in amplitude and phase images across the entire timescale, enabling the observation of subtle phase changes, such as crater rim formation and thermal diffusion. This new imaging system advances the fundamental study of femtosecond DUV laser processing of glass materials across multi-timescales.

Authors

Institutions

Publication Details

Published
2025-09-18
DOI
https://doi.org/10.1117/12.3063324
Primary Topic
Integrated Circuits and Semiconductor Failure Analysis
Type
article
Field-Weighted Citation Impact
0.00
Controls
|||
ALL TIME
JAN
FEB
MAR
APR
MAY
JUN
JUL
AUG
SEP
OCT
article

Trans-timescale imaging of deep-UV femtosecond laser ablation of dielectrics with time-resolved digital holographic microscopy

Keiichiro Toda, Takuro Ideguchi, Kuniaki Konishi, Haruyuki Sakurai et al.
Integrated Circuits and Semiconductor Failure Analysis
article

Trans-timescale imaging of deep-UV femtosecond laser ablation of dielectrics with time-resolved digital holographic microscopy

Keiichiro Toda, Takuro Ideguchi, Kuniaki Konishi, Haruyuki Sakurai, Shotaro Kawano
article en

Abstract

We present trans-timescale imaging of femtosecond DUV laser ablation of a glass substrate, driven by linear absorption, using time-resolved digital holographic microscopy spanning from sub-picoseconds to milliseconds. This method integrates two probe branches within a pump-probe digital holographic imaging system: a femtosecond probe pulse for capturing dynamics from sub-picoseconds to nanoseconds and a nanosecond pulse for nanosecond-to-millisecond observations. To enable high-precision complex-field imaging, we developed a stable common-path interferometer, achieving milli-radian-level phase precision. Using this system, we investigated the surface processing dynamics of a BK7 glass substrate, which has an absorption edge around 300 nm, induced by a 257-nm femtosecond pump pulse. Our measurements revealed dynamic variations in amplitude and phase images across the entire timescale, enabling the observation of subtle phase changes, such as crater rim formation and thermal diffusion. This new imaging system advances the fundamental study of femtosecond DUV laser processing of glass materials across multi-timescales.

The University of Tokyo (JP)
Openalex Percentile: Top 75%
Integrated Circuits and Semiconductor Failure Analysis
AI Navigator

Ask Laika to Summarize, Analyze, and Connect papers live on the map.

Summarize Papers & Methodologies

Extract key findings, datasets, and comparative methods across publications.

Benchmark Rankings & Visual Analytics

Rank top research institutions, authors, funders, topics, and journals by Field-Weighted Citation Impact (FWCI) and paper volume with instant charts.

Connect Distant Disciplines

Bridge topological clusters on the map to find hidden collaborative intersections.