Design of beam direction controllable multijunction rectangular VCSEL

Abstract In this paper, a novel beam direction controllable multi-junction Vertical-Cavity Surface Emitting Laser (VCSEL) is proposed. By etching periodic blazed gratings on the 300 μm in length rectangular triple-junction VCSEL surface insulating layer, the defect of multi-beam emission of current micro-structured lasers is successfully suppressed, and a high power directional single beam was achieved according to the simulation. In addition, by integrating VCSELs with blazed gratings of different grating periods into an array, the emission directions of the laser beams can cover a large field of view (FOV) of 130°. Considering the complexity of the blazed grating fabrication, the diffraction effects using a 3-step multilevel grating as an alternative are also simulated in this paper, and the results demonstrate that it can also achieve the same FOV theoretically. By integrating VCSELs with different beam deflection angles into an array, it is expected to be applied to all-solid-state light detection and ranging (LiDAR) systems for direct scanning.