On-line plasma FIB for x-ray microscopy mesoscale analysis
X-ray microscopy with cryogenic capabilities offers unprecedented opportunities for multiscale analysis of biological and environmental samples, from examining tissue samples of millimeters in size with microscale resolution to single-cell samples with nanometer resolution. However, analysis at multiple scales often requires optimization of sample dimensions or geometry between analytical steps, which imposes additional challenges and may increase risk of sample damage. The goal of our work is to implement a plasma focused ion beam (PFIB) apparatus to a cryogenic nanoprobe beamline (Bionanoprobe-II) at the Advanced Photon Source to perform on-line sample manipulation. We have reported here the design and performance evaluation of the major components of the system, as well as the integration concept. These developments represent initial steps toward implementing PFIB sample preparation for synchrotron-based x-ray fluorescence (XRF) microscopy and lay the foundation for a fully integrated, cryogenically compatible workflow that enables precise, multiscale XRF analysis of fragile biological and environmental specimens while preserving their native structure and composition.
Authors
- Benjamin L. Davis (ORCID: https://orcid.org/0000-0002-4306-5950)
- Olga Antipova (ORCID: https://orcid.org/0000-0002-5290-1199)
- Kenneth Kemner (ORCID: https://orcid.org/0000-0002-1409-8542)
- Joonsu Han (ORCID: https://orcid.org/0000-0002-7794-0661)
- Ajith Pattammattel (ORCID: https://orcid.org/0000-0002-5956-7808)
- Yuzi Liu (ORCID: https://orcid.org/0000-0002-8733-1683)
- Tuğba Isık (ORCID: https://orcid.org/0000-0001-7328-9819)
- Evan Maxey (ORCID: https://orcid.org/0000-0001-7519-5277)
- Si Chen (ORCID: https://orcid.org/0000-0001-6619-2699)
- Jie Liu (ORCID: https://orcid.org/0000-0001-9999-7274)
- Xiaozhi Zhang (ORCID: https://orcid.org/0000-0001-6789-5660)
Institutions
- Argonne National Laboratory (US)
- Stanford Synchrotron Radiation Lightsource (US)
- National Synchrotron Light Source II
Publication Details
- Published
- 2025-09-18
- DOI
- https://doi.org/10.1117/12.3063662
- Primary Topic
- Integrated Circuits and Semiconductor Failure Analysis
- Type
- article
- Field-Weighted Citation Impact
- 0.00