On-line plasma FIB for x-ray microscopy mesoscale analysis

X-ray microscopy with cryogenic capabilities offers unprecedented opportunities for multiscale analysis of biological and environmental samples, from examining tissue samples of millimeters in size with microscale resolution to single-cell samples with nanometer resolution. However, analysis at multiple scales often requires optimization of sample dimensions or geometry between analytical steps, which imposes additional challenges and may increase risk of sample damage. The goal of our work is to implement a plasma focused ion beam (PFIB) apparatus to a cryogenic nanoprobe beamline (Bionanoprobe-II) at the Advanced Photon Source to perform on-line sample manipulation. We have reported here the design and performance evaluation of the major components of the system, as well as the integration concept. These developments represent initial steps toward implementing PFIB sample preparation for synchrotron-based x-ray fluorescence (XRF) microscopy and lay the foundation for a fully integrated, cryogenically compatible workflow that enables precise, multiscale XRF analysis of fragile biological and environmental specimens while preserving their native structure and composition.

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Published
2025-09-18
DOI
https://doi.org/10.1117/12.3063662
Primary Topic
Integrated Circuits and Semiconductor Failure Analysis
Type
article
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article

On-line plasma FIB for x-ray microscopy mesoscale analysis

Benjamin L. Davis, Olga Antipova, Kenneth Kemner, Joonsu Han et al.
Integrated Circuits and Semiconductor Failure Analysis
article

On-line plasma FIB for x-ray microscopy mesoscale analysis

Benjamin L. Davis, Olga Antipova, Kenneth Kemner, Joonsu Han, Ajith Pattammattel, Yuzi Liu, Tuğba Isık, Evan Maxey, Si Chen, Jie Liu, Xiaozhi Zhang
article en

Abstract

X-ray microscopy with cryogenic capabilities offers unprecedented opportunities for multiscale analysis of biological and environmental samples, from examining tissue samples of millimeters in size with microscale resolution to single-cell samples with nanometer resolution. However, analysis at multiple scales often requires optimization of sample dimensions or geometry between analytical steps, which imposes additional challenges and may increase risk of sample damage. The goal of our work is to implement a plasma focused ion beam (PFIB) apparatus to a cryogenic nanoprobe beamline (Bionanoprobe-II) at the Advanced Photon Source to perform on-line sample manipulation. We have reported here the design and performance evaluation of the major components of the system, as well as the integration concept. These developments represent initial steps toward implementing PFIB sample preparation for synchrotron-based x-ray fluorescence (XRF) microscopy and lay the foundation for a fully integrated, cryogenically compatible workflow that enables precise, multiscale XRF analysis of fragile biological and environmental specimens while preserving their native structure and composition.

Argonne National Laboratory (US), Stanford Synchrotron Radiation Lightsource (US), National Synchrotron Light Source II
Openalex Percentile: Top 75%
Integrated Circuits and Semiconductor Failure Analysis
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On-line plasma FIB for x-ray microscopy mesoscale analysis — Benjamin L. Davis, Olga Antipova, et al. · (2025) | TGRS Research Map | TGRS