Scanning x-ray microscopy based on MEMS technology

Scanning an x-ray nanobeam instead of the sample can be highly advantageous in experimental scenarios where a fast sample movement is not possible, such as in-situ measurements. Here, fast sample scanning is often hampered by a heavy or bulky sample environment. In this contribution, we present first results of an x-ray beam scanning experiment using a multilayer x-ray mirror to deflect a nanofocused x-ray beam created by diamond compound refractive lenses. By slightly tilting this mirror within the angular acceptance range of the multilayer, a nanofocused x-ray beam was scanned in horizontal direction by 28 μm in the focal plane of the optics. This tilting is driven by an underlying biaxial micro-electromechanical system (MEMS) that can be rapidly steered. The performance of this x-ray MEMS mirror and its influence on the focusing properties of the x-ray beam will be presented.